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MEMS Mechanical Sensors


MEM Mechanical Sensors

Stephen Beeby, Graham Ensell Michael Kraft and Neil White


Artech House Inc.


279 pages; $95 [pound sterling]63


ISBN: 1-58053-536-4

The prime objective of this volume is to give an overview of MEM mechanical transducers. In order to achieve this, more [i]or[/i] less background information on the various fabrication techniques


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